Modulated Pulse AeroBar Model 5635
$2,313.30
Modulated Pulse Technology with Wide Adjustability & ISO 14644-12 Ionization
Simco-Ion, Technology Group's AeroBar 5635 Modulated Pulse ionizing bar is specifically designed to eliminate static charge in semiconductors and other ultra-clean manufacturing processes where fast discharge time, low swing voltages, and precision balance are required. The Model 5635 utilizes MP technology, combining a high-frequency sine wave with modulated pulses (MP) for high ion output and delivery. This breakthrough technology enables AeroBar mounting within 150 mm of the wafer. MP technology, combined with ultra-clean silicon emitter points and precision adjustment, provides ISO 14644-12 ionization (0.01 µm particles or nanoparticles) and ISO 14644 Class 1 (0.1 µm particles) cleanliness, critical for smaller technology nodes.
- Extended ISO Class 1 (10 nm) particles cleanliness
- Modulated pulse technology
- Excellent lateral uniformity
- Low field voltages
- Air-assist capability
- Optional software with an easy-to-use interface with wide adjustability
- Alarm output signal
| Specification | Value |
|---|---|
| Voltage Input | 24 VDC +/-10% power input RJ-45; 0.7A (max) |
| Output | 13.5 kV p-p (max), adjustable |
| Discharge | +/-1000-100V in 15 sec (typ) with no air-assist, Vp-p swing of 80 at 24 in below an emitter center group of points |
| Balance | <+/-35V measured in a controlled environment at 18 in distance |
| Range | 150-1000 mm distance to surface; application & customer specification dependent |
| Ion Emission | Modulated Pulse (MP) Technology |
| Emitter | Points: ISO 14644-1 Class 1 single-crystal silicon; Pitch: 50 mm spacing for bars <=600 mm, 75 mm spacing between nozzles on all other lengths; Frequency: low 0.3-1.5 Hz, high 1-33 Hz |
| Cleanroom Class | ISO 14644-1 (0.1 um particles) and Extended ISO Class 1 cleanliness (10 nm particles) using 45-50% output voltage setting and OpenJet nozzles with single-crystal silicon emitters |
| Air Supply Input | Clean Dry Air (CDA) or Nitrogen |
| Air Supply Pressure | 45 psi max |
| Air Supply Flow | 1-3.5 lpm/nozzle |
| Air Supply Connection | 8 mm OD one-touch fitting |
| Bar Setting | DIP switches for general power settings; trimpots for fine tuning balance, frequency, & power output; or use the serial output to the 5635 Bar MP Control software for fine adjustments |
| Ozone | <0.05 ppm (24-hour accumulation) |
| EMI | Below background level |
| Operating Env | 15-35C (59-95F); 30-60% RH, non-condensing |
| Enclosure | ABS chassis; stainless steel ground plate |
| Dimension | 3.1"H x 1.3"W x 17.7 / 23.6 / 33.5 / 39.3 / 45.3 / 51.2 / 57.1 / 63.0 / 69.0 / 74.8 / 80.7 / 86.6 / 92.5"L (7.8 x 3.4 x 45 / 60 / 85 / 100 / 115 / 130 / 145 / 160 / 175 / 190 / 205 / 220 / 235 cm) |
| Specifications, configurations, and product images are subject to change without notice. Refer to the manufacturer's documentation for current details. |
| Item | Part Number |
|---|---|
| Bar, OpenJet nozzle with single-crystal silicon emitter | 91-5635-xxxx-yy-QOU30 (xxxx = 450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350 mm; yy = -50 or -75; 450 and 600 mm available only with -50) |
| Power Distribution Box, 24 VDC; powers up to 8 MP AeroBars | 33-5601-03 |
| 24 VDC Power Supply for Model 5601 Power Distribution Box | 14-21241 |
| Signal and Power Junction Box for 1 AeroBar | 33-21491 |
| AeroBar MP Remote Serial Adapter Kit | 92-5635-001 |
| 24 VDC Power Converter with Power/Signal Junction Box Kit for 1 AeroBar | 33-25625 |
| CAT-5 with RJ-45 Ethernet Cable (xx = 6, 10, 15 ft), white | 25-0540-xx |
| Flat mounting clips | 28-63702 |
| Horizontal rotatable mounting bracket | 32-222102 |
| Vertical rotatable mounting bracket | 32-22220 |
| Flat mounting clip with active/screw fasteners (2) for AeroBar | 33-53532 |