Modulated Pulse AeroBar Model 5645
Modulated Pulse AeroBar® with Feedback Control
Simco-Ion, Technology Group's latest Modulated Pulse (MP) Technology ionization bar is now available with active monitoring and feedback control through the Novx System and Novx Inside versions. The 5645 MP bar is designed to provide industry-leading balanced ionization performance for semiconductor back-end advanced packaging and test applications and front-end demanding ultra-clean applications for fast discharge time, low swing voltages, and precision balance. This advanced technology enables AeroBar mounting within 150 mm of the wafer.
When installed with Novx System or Novx Inside, monitoring and feedback control, the 5645 can maintain precise balance better than ±5V. The bar can easily adjust and fine-tune voltage, frequency, and balance to meet environmental and product sensitivity requirements. Model 5645 MP bar is available in 14 lengths, from 350-2350 mm.
- ±5V with Novx System or Novx Inside version
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ISO 14644-1 Class 3
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Centralize power and control with widely adjustable MP Control Software
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Sensor input, FMS connection, alarms, power, and communications are located on the same end of the bar
| Specification | Value | |
|---|---|---|
| Voltage Input | 24 VDC +/-10%, 0.7A (max) | |
| Output | 13.5 kV peak-to-peak (max) | |
| Discharge | 15 sec (typ) with no air-assist measured @ 24 in (61.0 cm) below AeroBar center | |
| Balance | <+/-5V, Novx System or Novx Inside; <+/-20V, Standalone | |
| Ion Emission | Modulated Pulse (MP) Technology | |
| Emitter | Point: Titanium; Voltage: 13.5 kV peak-to-peak (max); Frequency: 0.3-60 Hz; Pitch: 50 mm spacing (350/450/600 mm lengths only); 75 mm spacing between nozzles on all other lengths | |
| Cleanroom Class | ISO 14644-1 Class 3 | |
| LED Indicator | Green steady NORMAL operation, green flashing STANDBY, red ALARM | |
| Bar Setting | Adjustment made remotely via software controlled with Model 5601 Power Distribution Box; no manual adjustment on the bar | |
| Air Supply Input | Optional Clean Dry Air (CDA) or Nitrogen | |
| Air Supply Flow | OpenJet 45 psi max gas pressure, 1-3.5 lpm/nozzle thru 8 mm OD one-touch fitting | |
| Air Supply Connection | 8 mm tubing (OD) bulkhead, one-touch fitting; no daisy-chain capability | |
| Ozone | <0.05 ppm | |
| EMI | Below background level | |
| Operating Env | 15-35C (59-95F); 30-60% RH, non-condensing | |
| Enclosure | ABS chassis, stainless steel rail on the outside of the bar | |
| Dimension | 3.1"H x 1.3"W x 13.8/17.7/23.6/33.5/39.3/45.3/51.2/57.1/63.0/69.0/74.8/80.7/86.6/92.5"L (7.8 x 3.4 x 35/45/60/85/100/115/130/145/160/175/190/205/220/235 cm) | |
| Specifications, configurations, and product images are subject to change without notice. Refer to the manufacturer's documentation for current details. |
| Item | Part Number |
|---|---|
| Bar, Standalone | 91-5645-xxx-yy-QOC30-01 (xxx = 350/450/600/850/1000/1150/1300/1450/1600/1750/1900/2050/2200/2350 mm; yy = 50 mm for 350/450/600, otherwise 75 mm) |
| Bar, Novx Inside (SMA connector) | 91-5645A-xxx-yy-QOC30-01 (xxx and yy per above) |
| Bar, Novx System (RJ-11 connector) | 91-5645N-xxx-yy-QOC30-01 (xxx and yy per above) |
| Power Distribution Box, 24 VDC, 8 bars max | 33-5601-03 |
| 24 VDC Power Supply for Model 5601 Power Distribution Box | 14-21241 |
| AeroBar MP Remote Serial Adapter Kit | 92-5635-001 |
| Passive Antenna w/SMA cable 5 ft/1.5m | 33-0504 |
| Passive Antenna w/SMA cable (xx = 5, 10, 20 ft) | 33-0521-xx |
| RJ-11 cable for Novx 3352/3362 (xx = 6, 10, 20 ft) | 33-1620-xx |
| 24 VDC Power Converter w/Power/Signal Junction Box Kit | 33-25625 |
| CAT-5 Ethernet cable (xx = 6, 10, 15 ft), white | 25-0540-xx |
| MP Control Software | 91-5635-SW-Vx.x |